Olympus MX63 semiconductor industrial inspection microscope systems offer easy, accurate, and comfortable observations of micro-structures on wafers up to 300 mm. The microscopes meet international standards including SEMI S2/S8, CE, and UL. Advanced imaging technology delivers clear micrographs, and an ergonomic design helps minimize user fatigue.
Specifications
Weight Approx. 35.6kg?Microscope frame 26kg
Stage (X × Y)
Coaxial right handle with built-in clutch drive: MX-SIC8R
Stroke: 210 x 210 mm
Transmitted light illumination area: 189 x 189 mm
Coaxial right handle with built-in clutch drive: MX-SIC6R2
Stroke: 158 x 158 mm
(Reflected light use only)
Motorized nosepiece
Brightfield
Motorized sextuple with a slider slot for DIC: U-D6REMC
Motorized centerable quintuple with a slider slot for DIC: U-P5REMC
Brightfield and darkfield
Motorized sextuple with a slider slot for DIC: U-D6BDREMC
Motorized quintuple with a slider slot for DIC: U-D5BDREMC
Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC
Observation tube
Wide-field (FN 22 mm)
Erect and trinocular: U-ETR4
Erect, tilting and trinocular: U-TTR-2
Inverted and trinocular: U-TR30-2, U-TR30IR (for IR observation)
Inverted and binocular: U-BI30-2
Inverted, tilting and binocular: U-TBI30
Super-wide-field (FN 26.5 mm)
Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%)
Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%)
Inverted and trinocular: U-SWTR-3
Maximum load weight (including stage and holder)
8 kg
Focus
Stroke: 32 mm
Fine stroke per rotation: 100 Μm
Minimum graduation: 1Μm
Upper limit stopper and torque adjustment for coarse handle
Transmitted light illumination
Transmitted light illumination unit: MX-TILLA or MX-TILLB is required.
- MX-TILLA: a condenser (NA 0.5) and an aperture stop
- MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop
Light source: LG-PS2 (12 V,100 W halogen lamp) Light guide: LG-SF
Observation mode: brightfield, simple polarizing
Reflected light illumination
White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp
Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.)
3 position coded mirror units changed by manual operation
Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield)
Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, infra-red*1 and MIX observation(4 directional darkfield)*2
*1 Optional mirror cube, *2 MIX observation configuration is required
